Learning Unit Three

• Introduction

• Operation of an Ion Implanter

• Example Problems

• Mechanism of Ion Stopping

• Mathematical Model of Ion Implantation

• More Accurate Treatment of Two-Dimensional Ion Profiles

• Lattice Damage

• Recoils

• Channeling

• Furnace Annealing

• Rapid Thermal Annealing

• Ion Implantation Versus Thermal Diffusion

• Formation of Shallow Junction

• Quiz 3