Introduction
Learning Unit One
Learning Unit Two
Learning Unit Three
Learning Unit Four
Learning Unit Five
•
Introduction
•
Etch Rate
•
Uniformity
•
Selectivity
•
Etch profiles
•
Wet Etch Process
•
Wet Etching of Si, SiO
2
, Si
3
N
4
•
Pattern Transfer Using the Lift-Off Technique
•
Pattern Transfer Using the Etching Technique
•
Plasma Etch Process
•
Plasma Etch Chambers
•
Plasma Etching of Silicon
•
Plasma Etching of Polysilicon
•
Plasma Etching of Metals
•
Quiz 5
