Introduction
Learning Unit One
Learning Unit Two
Learning Unit Three
Learning Unit Four
Learning Unit Five
Introduction
Etch Rate
Uniformity
Selectivity
Etch profiles
Wet Etch Process
Wet Etching of Si, SiO
2
, Si
3
N
4
Pattern Transfer Using the Lift-Off Technique
Pattern Transfer Using the Etching Technique
Plasma Etch Process
Plasma Etch Chambers
Plasma Etching of Silicon
Plasma Etching of Polysilicon
Plasma Etching of Metals
Quiz 5