[1] Richard C. Jaeger, Introduction to Microelectronic Fabrication, Volume V, Addison-Wesley Publishing Company, New York, 1993.


[2] S.M.Sze, VLSI Technology, McGraw-Hill, Boston, 1988.


[3] Hong Xiao, Introduction to Semiconductor Manufacturing Technology, Prentice Hall, New Jersey, 2001.


[4] Stephen A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, New York, 1996.


[5] Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era, Lattice Press, California, 1986.


[6] Emanuele Rimini, Basics to Device Fabrication, Kluver Academic Publishers, Boston, 1995.


[7] Robert F. Pierret, Semiconductor Fundamentals, Addison-Wesley Publishing Company, New York, 1988.